|
Spares from: SVG, SVG Thermco (Aviza), |
| SVG | |||
 |
Part No. not known | Valve, check, 1/8" lift (Swagelock/Whitey) | Part No. not known |
|
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Part No. not known | Transformer, 230/115v input, 12.6V/2A or 6.3v 4A output | Part No. not known |
|
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Part No. not known | Transformer, 230/115v input, 16V/1.5A or 8v 3A output | Part No. not known |
|
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06-262-24C | PCB, Pre-amp Centre MET | 0626224C. |
|
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06-32331-00 | Shaft, developer | 063233100. |
| 06-95076-02 | Valve, Vacuum 2-S | 069507602. |
|
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06710-01 | Guide, DEV shield | 0671001. |
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06719-01 | Seal, top | 0671901. |
|
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06728-01 | Spindle, Lift Plat | 0672801. |
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088056-00 | Lamp, ultra-violet, ozone | 08805600 |
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0923001EO1 | Fuse holder, SVG | 0923001EO1. |
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103-6388 | Transistor, PNP, Darlington, 120V, 50A | 1036388 |
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107-004 | Relay, 24VDC, 3PDT (3pole c/o), 10A@240VAC | 107004 |
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109-003 | Switch, Air Pressure | 109003. |
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109-102 | Relay, Solid State, 90-280V Input, 240VAC, 25A, Output Switch | 109102 |
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111-002 | Lamp, 6V | 111002. |
|
| 111/046 | Fuse, 250mA, 250V, SB | 111046. |
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112-007 | Brush, for SVG 11 | 112007. |
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114-024 | Valve, Solenoid 024 SVG, N3201A, 24VDC, 8.5W | 114024. |
|
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114-025 | Valve, Solenoid 025, 24VDC, 8.5W, 0-100 PSIG, MINI-MYTE | 114025. |
|
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114-045 | Valve, Develop Car | 114045. |
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11959-01 | Insert. Catch Cup | 1195901. |
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120-296-000 | Circlip, External 7 x 0.1 (0.275" x 0.04") | 120296000. |
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121115 | Thermocouple, Torch | 121115 |
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122-295-170 | Water Connection | 122295170. |
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122900-001 | Boat Loader Board | 122900001. |
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13408/04 | Chuck, wafer, MHP, 150mm | 1340804. |
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| 141250-001 | Tape Drive Thermco | 141250001. |
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14506-01 | Nozzle, Bath tip P | 1450601. |
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14508-01 | Pivoting tub DUNK | 1450801. |
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14510-01 | Shaft, bath pivot | 1451001. |
|
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147298-001 | Power Supply, Thermco, 115VAC, 24V, 2A o/p | 147298001. |
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15389-01 | Resist Coater CAT | 1538901. |
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| 15752/01 | Bushing, CCR | 1575201. |
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15851-01 | Cup, Rinse. ROSS | 1585101. |
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16111-02 | Shaft, Developer | 1611102. |
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16188-01 | Pin, Wafer chill PLT | 1618801. |
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16195-01 | Coupling, Modified Rev A | 1619501. |
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16217-01 | Pin, Wafer HPD | 1621701. |
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16269-01 | Arc shaft | 1626901. |
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17-05114 | PCB, Extender Card | 1705114. |
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17-16813-01 | PCB, Extender card | 171681301. |
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17-46132-01 | Kit, upgrade for linear bearings/shafts on all 8626, 8642, 8826, SMC, and 8842 pivoting mo inb dispense systems | 174613201. |
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17215-01 | Catch Cup Sog Top | 1721501. |
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17215-02 | Catch Cup Top pivot | 1721502. |
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17276-01 | Nut, locking, knurled | 1727601. |
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17530/02 | Nozzle | 1753002. |
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18258-01 | Spindle, down stop | 1825801. |
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19108-01 | Chuck, Scrub 1 | 1910801. |
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201-007 | Seal, bushing ball, 3/8" | 201007. |
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| 201-093 | Wheel, Guide rail S | 201093. |
|
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201-095 | Bushing, wheel guide | 201095. |
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20118-10-168 | Meter, Power input | 2011810168. |
|
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202-003 | O-Ring, 40x2.5, 1.8x0.103" Polyurethane Jointed | 202003. |
|
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202-023 | O-Ring, 52.07x2.62, Polyurethane | 202023. |
|
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202-161 | O-Ring, 247.32x2.62 SVG | 202161. |
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202-186 | O-Ring, 202.87x2.62 SVG | 202186. |
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| 202/254 | Belt, timing, C5-6-4 | 202254. |
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202/278 | Belt, Geareg Pulley, | 202278. |
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202/283 | O-ring, 2x2, Teflon | 202283. |
|
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203-020 | Cylinder, SVG P/C pump | 203020. |
|
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205-252 | Bumper, lift plate | 205252. |
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205-453 | Washer, curved, spring. 3/8"id, 7/8"od | 205453. |
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206/001 | Adaptor, brass | 206001. |
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206/247 | Ferrule, coater, teflon | 206247. |
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206/468 | Quick disconnect coupling | 206468. |
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206/470 | Coupling | 206470. |
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206/490 | Quick disconnect coupling insert | 206490. |
|
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206/621 | Quick disconnect coupling | 206621. |
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206/666 | Elbow, 10-32x1/8T, Barb Nylon | 206666. |
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206/850 | Coupling, flexible with clamps | 206850. |
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207/004 | Gasket | 207004. |
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209-102 | Switch, Float | 209102. |
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212-002 | Tubing 1.58mm 1/16", Blue Polyurethane | 212002. |
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212/013 | Tubing, Polyurethane, Red, 1/8" OD, 1/16 ID, 100' | 212013. |
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213-015 | Valve, MRTG. 1/8 N | 213015. |
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213-042 | Valve, P/C 042 SVG | 213042. |
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213-139 | Valve, 3way, pneumatic, teflon | 213139. |
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214-095 | Spacer, 12 X 18 X 0 | 214095. |
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215-156 | Coupling, rigid | 215156. |
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219-093 | Pump, Magnet, 220V/240V, 50/60Hz, 0.55A | 219093 |
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220-026 | Pulley, 026 SVG | 220026. |
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322114EO1 | O-Ring, 9.19x2.62 Polyurethane | 322114EO1. |
|
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3221488EO1 | Shaft Seal 0.88/0.50x0.125" (22.35/12.7x3.175) for Ball Bushing | 3221488EO1. |
|
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3221492EO1 | V-Ring 20/14x5.5 V 16 A | 3221492EO1. |
|
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3221494EO1 | Shaft Seal 6/11x3.5 PTFE | 3221494EO1. |
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3221495EO1 | Gasket, Seal 11/39x1 VP Carrier SVG | 3221495EO1. |
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| 3222115EO1 | O-Ring, 15.6x1.78, Viton | 3222115EO1. |
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3222162EO1 | O-Ring, 164.77x2.62, jointed Polyurethane | 3222162EO1. |
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3222163EO1 | O-Ring, 35x2.5, 1.674x0.103" Jointed Polyurethane | 3222163EO1. |
|
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3224654EO1 | Gasket, Seal 10/16x1.78 VPO Shaft SVG | 3224654EO1. |
|
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4521547EO1 | Pulley, 027 SVG | 4521547EO1. |
|
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500454-001 | Coupling, universal, Encoder ML-18-A T | 500454001. |
|
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5921709EO1 | Brush, Motor SVG 007 | 5921709EO1. |
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| 600051-01 | PCB, Analogue input VTR | 60005101. |
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| 600053-01 | PCB, Analogue output | 60005301. |
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604101 | Catch Cup Bottom | 604101. |
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6421725EO1 | Panel, control PC | 6421725EO1. |
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6421726EO1 | Panel, control SSC | 6421726EO1. |
|
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644-0327-014 | Drive Carriage Assy PE, Type- HEM 3512-12, 1000 cycles, | 6440327014 |
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644-0751-001 | PCB, Pre-amp gain 1mm PE | 6440751001. |
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| 644-4509-004 | Gear, carriage drive PE | 6444509004. |
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644-5567-002 | Carriage DR isolator PE | 6445567002. |
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644-6813 | Block aligner 6813 PE | 6446813. |
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673408 | Chuck, developer | 673408. |
|
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677-0483-001 | Disc Encoder | 6770483001. |
|
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677-0551 | Carrier, Mask 5" x 5" x 090 | 6770551. |
|
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680-0130-017 | Heater | 6800130017. |
|
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681-0023-010 | Lamp, RF interface | 6810023010. |
|
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681-0023-013 | Lamp, AC | 6810023013. |
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681-0117-010 | Thermostat | 6810117010. |
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681-0191-001 | Feedthrough Housing | 6810191001. |
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682-0033-001 | O-Ring, 2.9x1.78, Nitrile | 6820033001 |
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682-0038-075 | Ferrule | 6820038075. |
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682-0049-044 | Ring, retaining | 6820049044. |
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682-0072-003 | Shaft, worm carriage drive, PE | 6820072003. |
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682-0079-005 | Flat Washer | 6820079005. |
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682-0135-002 | Worm carriage drive PE | 6820135002. |
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682-0148-111 | Spherical Washer | 6820148111. |
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682-0159-009 | Clamp, Pressure shaft PE | 6820159009. |
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682-0170-502 | Filter, Element | 6820170502. |
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682-0218-006 | Hose Barb 10-32 | 6820218006. |
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682-0249-002 | Valve, Air, 3way Northeast Fluidics Model 2010 | 6820249002. |
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682-0352-001 | Nut, Lock | 6820352001. |
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682-0352-002 | Washer, Lock | 6820352002. |
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682-0354-001 | Rad Bearing Console | 6820354001. |
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682-0357-001 | Flanged Bearing | 6820357001. |
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6838-9410-0 | Diode, TEM 10D8 1W 800V 25 | 683894100. |
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688-0085-000 | 6-32 1/4 Inch Long | 6880085000. |
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688-0407-000 | Screw, Clamp | 6880407000. |
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688-0480-000 | Screw | 6880480000. |
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690-1298-002 | Filter, PE600 Fibre bundle | 6901298002. |
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690-4217-001 | Actuator, Mask transport latch | 6904217001. |
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690-4473-001 | Filter, Hepa PE600 | 6904473001. |
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698-0215-002 | Valve, load mode Isolator | 6980215002. |
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698-0439-003 | Stand Connect RF | 6980439003. |
|
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698-0456-001 | Photomultiplier Hammamatsu | 6980456001. |
|
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698-0786-001 | Actuator Detector cable | 6980786001. |
|
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698-1838-001 | Window Vacuum Chamber | 6981838001. |
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698-1867-001 | Friction pad | 6981867001. |
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698-1872-001 | Starter Clamp Inductor | 6981872001. |
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698-1969-002 | Insulator, Base Plate | 6981969002. |
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698-1970-001 | Insulator, chuck ring | 6981970001. |
|
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698-1973-002 | Insulating Sleeves | 6981973002. |
|
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698-1976-002 | Gas Distribution Plate | 6981976002. |
|
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698-2046-001 | Lift Pins | 6982046001. |
|
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698-2157-003 | Insulating Bushing | 6982157003. |
|
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698-2173-003 | Clamping Corner | 6982173003. |
|
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698-2229-001 | Insulating Cap | 6982229001. |
|
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698-2267-001 | Vent Bushing | 6982267001. |
|
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698-2290-001 | Annular Transparent Ring | 6982290001. |
|
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698-2314-001 | Insulator : Bottom | 6982314001. |
|
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698-2381-001 | Insulator, Window | 6982381001. |
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698-9061-001 | PCB, ISBC 534 Communication Expansion Board 942-6115-002 | 6989061001. |
|
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698-9062-001 | PCB, CM126A memory | 6989062001. |
|
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698-9105-004 | PCB, Endpoint | 6989105004. |
|
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698-9447-001 | Cable, Assy | 6989447001. |
|
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698-9474-001 | Box Assembly EPD s/n 041 | 6989474001. |
|
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6980803002 | PCB, Driver | 6980803002. |
|
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6981701001 | PCB, Assy. Pneumatic | 6981701001. |
|
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698198002 | Matel O-Ring | 698198002. |
|
|
7190 | Rule, notched UL90 | 7190. |
|
| 7829561EO1 | Kit, Belt (Motorola seal kit) | 7829561EO1. |
|
|
80-146A | PCB, Vacuum Delay | 80146A. |
|
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80103D2-30 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 | 80103D230. |
|
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80122C3-04 | SVG Track Interface Board, 80122 or 99-71122A | 80122C304. |
|
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80157F | ATS Controller (Transport Arm) | 80157F |
|
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869-8000-002 | Harness Assy 6F Mask Trans | 8698000002. |
|
|
901710-002 | Switch, push button, SPDT (Thermco MUX RESET) | 901710002. |
|
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901975-002 | Valve, Gate, 1 1/2inch opening, Pneumatic, S/Steel, | 901975002. |
|
|
904177-001 | Voltmeter Thermco CVD | 904177001. |
|
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905109-001 | Gate Valve, Bellows, ASST, 50mm, VLTO | 905109001. |
|
| 906649-001 | Power Supply, CB24-6, 85-132VAC, o/p 24VDC@6.5A, Thermco | 906649001. |
|
|
908596-002 | Heater Jacket, FLA | 908596002. |
|
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908600-001 | Heater Jacket, FLA | 908600001. |
|
|
90X2731 | 90X2731. | |
|
|
942-0207.001 | Thermocouple | 9420207001. |
|
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942-0226-001 | Valve, Gas Shut Off, NUPRO SS-4BK V51-1C | 9420226001. |
|
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942-0236-001 | Valve, Ball PM Assy | 9420236001. |
|
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942-0237-001 | Pressure Transducer, Validyne P305D | 9420237001. |
|
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942-0245-001 | Filter | 9420245001. |
|
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942-0251-001 | Fan, from Kooltronic - Motor 7163-2466 | 9420251001. |
|
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942-0252-001 | Fan, Filter | 9420252001. |
|
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942-1014-001 | Magnet Bracket | 9421014001. |
|
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942-1034-001 | Cup Flexure | 9421034001. |
|
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942-1036-001 | Arm Wafer Presence | 9421036001. |
|
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942-1069-001 | Bellows lift and loc | 9421069001. |
|
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942-1173-001 | Spring, Reel Assy | 9421173001. |
|
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942-1282-001 | Bellow Block Housing | 9421282001. |
|
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942-1283-001 | Guide, Bellow Block H 942-2528-101 | 9421283001. |
|
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942-2017-001 | Flexure Wafer ASM | 9422017001. |
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942-2023-001 | Lower Finger Part | 9422023001. |
|
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942-2026-001 | Adjusting Nut | 9422026001. |
|
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942-2033-001 | MTG Plate Elevator Shel | 9422033001. |
|
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942-2037-001 | Wafer Present Sensor | 9422037001. |
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942-2051-001 | Screw, Cover | 9422051001. |
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942-2111-001 | Sensor, Stud Mount | 9422111001. |
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942-2112-001 | Magnet Bar Mount | 9422112001. |
|
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942-2113-001 | Sensor, Mount | 9422113001. |
|
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942-2114-001 | Sensor Bracket | 9422114001. |
|
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942-2121-001 | L.S. Trip Bracket | 9422121001. |
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942-2194-001 | Electrode Housing | 9422194001. |
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942-2197-001 | Clamp | 9422197001. |
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942-2198-001 | Electrode Base | 9422198001. |
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942-2199-001 | Pin, Electrode | 9422199001. |
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942-2200-001 | Electrode House Pin | 9422200001. |
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942-2201-001 | Insulator, Electrode | 9422201001. |
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942-2204-001 | Gasket | 9422204001. |
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942-2206-001 | Feedthrough Housing | 9422206001. |
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942-2299-001 | Window | 9422299001. |
|
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942-2386-001 | Union | 9422386001. |
|
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942-5001-300 | Control Auto Zero Box | 9425001300. |
|
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942-5002-300 | PCB, End Stop | 9425002300. |
|
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942-5007-300 | PCB, Servo Position | 9425007300. |
|
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942-5009-300 | PCB, Power Regulator Low | 9425009300. |
|
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942-6112-001 | N2 Purge Valve Assy D2016-S33 10W, 24VDC | 9426112001. |
|
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942-6185-001 | Cable, Chassis to Digital | 9426185001. |
|
|
942-6215-001 | PCB | 9426215001. |
|
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942-6326-001 | Solenoid, Elec. Nupro. Angar scientific 4093M224120N0 | 9426326001. |
|
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942-6432-001 | PCB, Memory | 9426432001. |
|
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942-6474-001 | 400KHZ Matching | 9426474001. |
|
|
942-6503-001 | Cable, power | 9426503001. |
|
|
942-6517-001 | Filter, Strain Gauge | 9426517001. |
|
|
942-6518-001 | Filter | 9426518001. |
|
|
942-6594-001 A | PCB | 9426594001A. |
|
|
942-6651-001 | Eprom etc. Set (6 EPROMS + 2 other devices) | 9426651001. |
|
|
99-00303 | Pulley, assembly (with bearing) 303 SVG | 9900303. |
|
|
99-04089 | Thermocouple probe | 9904089 |
|
|
99-06635-06 | Air Ring assembly, CTD, 150mm | 990663506. |
|
|
99-14089-02 | Assembly, Micro step DR | 991408902. |
|
|
99-15742-02 | Heater element | 991574202. |
|
|
99-16594-02 | Element, Heater VP | 991659402. |
|
|
99-16883-02 | Assembly, Block HPO MA | 991688302. |
|
|
99-580103-30-001 | PCB, CPU, 86/88, HCIU STD W/O EP, 80103D 80103D2-30 | 9958010330001 |
|
| 99-80039-07 | Interface, Indexer | 998003907. |
|
|
99-80068 | PCB, Speed control | 9980068. |
|
|
99-80137 | PCB, Handler INTER | 9980137. |
|
|
99-80157-01 | ATS Controller (Transport Arm) | 998015701. |
|
| 99/80000/01 | Assembly, Single .25mA Sensor PCB | 998000001. |
|
|
9980115-01 | Assembly, SPDL CNTL 2T | 998011501. |
|
|
HPO 1 | Thermocouple | HPO1. |
|
| MV30-1657-60 | Liner, Furnace Mullite | MV30165760. |
|
|
OL-327 | Lamp, 28V, 40mA, G1736, OL327 | OL327. |
|
|
PT-33 | Gasket | PT33. |
|
|
S100701-01 | Belt, timing 6R3-174037 BEU VTR THERMC | S10070101. |
| SVG THERMCO (AVIZA) | |||
|
|
101560-01 | Centering Ring, ISO 80 | 10156001. |
|
| 104090-02 | Spacers .090 thick | 10409002. |
|
|
600768-01 | Switch, Deadman | 60076801. |
